How do MEMS Tilt Sensors Work?

 MEMS tilt sensors, as the name suggests, are tilt sensors manufactured by MEMS (microelectromechanical system) technology, which has the obvious advantage of very accurate measurement.

Here we explain the principle of MEMS tilt sensor through an example.

In simple terms, the MEMS tilt sensor is a non-contact measurement of the inclination of the target object through the Earth's gravity. In essence, the tilt sensor measures acceleration, especially gravitational acceleration, so it has an integrated accelerometer chip. The acceleration sensor chip consists of a MEMS sensing component and a peripheral signal processing circuit. The MEMS sensing components are shown as follows:

The blue part of the MEMS sensing component is mobile, while the red part is fixed. When accelerating or decelerating, the blue part will move left or right, and the capacitance between the blue and red parts will change accordingly. Acceleration can be determined by measuring the capacitors C1 and C2. As shown in the picture below:

That is, the acceleration or deceleration that occurs when the object is tilted causes the movable part of the MEMS sensing component to move to one side, as shown below:

It can be seen from this principle that the MEMS sensing component is very sensitive to vibration during the measurement process, and the vibration of the measured object will affect the measurement result. So filters must be added to eliminate interference beyond a certain frequency. Some MEMS tilt sensor manufacturers will also be equipped with filters according to user needs. There are two types of filters: Butterworth filters and Critically damped filters. Batvots is more suitable for measuring non-moving, high vibration objects, such as large drilling platforms; Critical damping filters are more suitable for measuring moving objects, such as engineering vehicles, agricultural vehicles, etc. The vast majority of tilt sensors on the market today are equipped with Butterwart filters only, or no filters at all.

Ericco’s ER-TS-3160VO built-in (MEMS) solid pendulum measures the change of static gravity field, which is converted into the change of inclination, and the change is output through the voltage (0~10V, 0~5V optional).

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